Semiconductor Industry: Wafer Fab Exhaust Management

Given the myriad exhaust compounds and the corresponding problems that they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, offers practical guidance on selecting an appropriate system for a given application.
Using examples that provide a clear understanding of the concepts discussed, Sherer covers facility layout, support facilities operations, an…

free download Semiconductor Industry: Wafer Fab Exhaust Management at http://hitebook.net/book/semiconductor-industry-wafer-fab-exhaust-management

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